http://www.nfc.umn.edu/coral/shortcourse-instructor.html Shortcourse Instructors
Coral Equipment Name |
Shortcourse Name |
Instructor (contact info below) |
|---|---|---|
| afm | Atomic Force Microscope | Paul Kimani |
| aja-sputter | AJA Sputter System | Lage Matzke |
| asher | Oxygen Asher | Tony Whipple |
| cpdryer | CP Dryer | Lage Matzke |
| cmp-oxide | CMP (chemical mechanical polisher) | Tony Whipple |
| cviv | CVIV | Tony Whipple |
| dcsputter | DC Sputter System | Kevin Roberts |
| deeptrench | Deep Trench Etcher | Lage Matzke |
| ebevap-cha | CHA E-Beam Evaporator | Lage Matzke |
| ebevap-temescal | Temescal E-Beam Evaporator | Lage Matzke |
| eb-evap-varian | Varian Electron Beam Evaporator | Kevin Roberts |
| ellipsometer-g, ellipsometer-r | Ellipsometry | Paul Kimani |
| fib | FEI Focused Ion Beam | Kevin Roberts |
| four-point-probe | Four Point Probe | Kevin Roberts |
| hs-scope | Confocal Microscope | Mark Fisher |
| ionmill | Ion Mill | Kevin Roberts |
| ir-oven | Image Reversal Oven | Paul Kimani |
| nanoline-1 | Nanoline | Paul Kimani |
| nanospec-1 | Nanospec | Paul Kimani |
| oriel | Flood Exposure System | Paul Kimani |
| oven | Photoresist Bake Ovens | Paul Kimani |
| pecvd | PECVD | Tony Whipple |
| raith | E-Beam Lithography | Kevin Roberts |
| raith sem | Raith Sem | Kevin Roberts |
| rta-1 | Rapid Thermal Annealer | Kevin Roberts |
| saw | Wafer Saw | Lage Matzke |
| sb6 | SB6 Wafer Bonder | Tony Whipple |
| scope | Optical Microscopes | Tony Whipple |
| spinners, aligners | Photolithography | Paul Kimani |
| srd | Rinser Dryer Systems | Tony Whipple |
| stresstest-2 | FSM 900 Laser Stress Measurement | Kevin Roberts |
| stresstest-1 | ADE Stress Measurement | Kevin Roberts |
| stsetch | STS Etcher | Tony Whipple |
| surface-prof-p16 | Tencor P16 Surface Profiler | Lage Matzke |
| surface-prof-3030 | Dektak 3030 Surface Profiler | Lage Matzke |
| thermal-evap | Thermal Evaporator | Kevin Roberts |
| trion1 | Trion 1 | Tony Whipple |
| trion2 | Trion 2 | Kevin Roberts |
| tube21-ht-oxide, tube22-gate-oxide, tube23-gen-oxide, tube24-alloy | Tylan Oxidation Furnace | Tony Whipple |
| tube31-lsn, tube32-poly, tube33-nitride, tube34-lto | Thermco LPCVD Furnace | Tony Whipple |
| wb-rca, wb-sol, wb-etch, wb-koh, wb-maskmaking, wb-gen-1, wb-gen-2, wb-hf, wb-resist | Wet Benches | Kevin Roberts |
| wirebond-1 | Wire Bonder #1 | Mark Fisher |
| Mask Design | Mark Fisher & Tony Whipple | |
Instructor Contact Information |
||
| Mark Fisher | fishe024@umn.edu | |
| Paul Kimani | kima0004@umn.edu | |
| Lage Matzke | matzk026@umn.edu | |
| Kevin Roberts | rober074@umn.edu | |
| Tony Whipple | whipp003@umn.edu | |
Coral comments and questions to
coral-issues@coral.nfc.umn.edu