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Shortcourse Instructor List
2008

Most short course notices are sent by e-mail and are posted on the display board at the entrance to the cleanroom.

Coral Equipment Name
Shortcourse Name
Instructor (contact info below)
afm Atomic Force Microscope Paul Kimani
aja-sputter AJA Sputter System Lage Matzke
asher Oxygen Asher Tony Whipple
cpdryer CP Dryer Lage Matzke
cmp-oxide CMP (chemical mechanical polisher) Tony Whipple
cviv CVIV Tony Whipple
dcsputter DC Sputter System Kevin Roberts
deeptrench Deep Trench Etcher Lage Matzke
ebevap-cha CHA E-Beam Evaporator Lage Matzke
ebevap-temescal Temescal E-Beam Evaporator Lage Matzke
eb-evap-varian Varian Electron Beam Evaporator Kevin Roberts
ellipsometer-g, ellipsometer-r Ellipsometry Paul Kimani
fib FEI Focused Ion Beam Kevin Roberts
four-point-probe Four Point Probe Kevin Roberts
hs-scope Confocal Microscope Mark Fisher
ionmill Ion Mill Kevin Roberts
ir-oven Image Reversal Oven Paul Kimani
nanoline-1 Nanoline Paul Kimani
nanospec-1 Nanospec Paul Kimani
oriel Flood Exposure System Paul Kimani
oven Photoresist Bake Ovens Paul Kimani
pecvd PECVD Tony Whipple
raith E-Beam Lithography Kevin Roberts
raith sem Raith Sem Kevin Roberts
rta-1 Rapid Thermal Annealer Kevin Roberts
saw Wafer Saw Lage Matzke
sb6 SB6 Wafer Bonder Tony Whipple
scope Optical Microscopes Tony Whipple
spinners, aligners Photolithography Paul Kimani
srd Rinser Dryer Systems Tony Whipple
stresstest-2 FSM 900 Laser Stress Measurement Kevin Roberts
stresstest-1 ADE Stress Measurement Kevin Roberts
stsetch STS Etcher Tony Whipple
surface-prof-p16 Tencor P16 Surface Profiler Lage Matzke
surface-prof-3030 Dektak 3030 Surface Profiler Lage Matzke
thermal-evap Thermal Evaporator Kevin Roberts
trion1 Trion 1 Tony Whipple
trion2 Trion 2 Kevin Roberts
tube21-ht-oxide, tube22-gate-oxide, tube23-gen-oxide, tube24-alloy Tylan Oxidation Furnace Tony Whipple
tube31-lsn, tube32-poly, tube33-nitride, tube34-lto Thermco LPCVD Furnace Tony Whipple
wb-rca, wb-sol, wb-etch, wb-koh, wb-maskmaking, wb-gen-1, wb-gen-2, wb-hf, wb-resist Wet Benches Kevin Roberts
wirebond-1 Wire Bonder #1 Mark Fisher
  Mask Design Mark Fisher & Tony Whipple
Instructor Contact Information
Mark Fisher fishe024@umn.edu  
Paul Kimani kima0004@umn.edu  
Lage Matzke matzk026@umn.edu  
Kevin Roberts rober074@umn.edu  
Tony Whipple whipp003@umn.edu