Process Information for PhotoLithography

Contact Aligner

• Specifications  [  PDF 12kB]
• Aligner characterization  [  PDF 192kB]

Futurrex Lift-Off Process

• NR1-3000PY data sheet  [  PDF 120kB]
  • Futurrex Data Sheet - Procedure to establish lift-off process  [  PDF 62kB]
• Lift-off process examples
  • NR1-3000PY  [  PDF 163kB]
  • NR9-1000PY  [  PDF 120kB]

Photoresist Oxygen Ash Rates

• 1813 ash rates  [  PDF 50kB]

YES-310

• Single Layer Lift-Off: Image Reversal of Positive Resist, to create a negative sidewall profile for Clean Lift-Off  [  PDF 1.7MB]

Photolithography Chemical Information
Photolithography Shortcourse Information

Microlithography from Cornell Nanofabrication Facility (optional reference material).

Please refer to the Shortcourse Instructor List to contact the instructor/specialist for more information regarding this instrument