The Nano Fabrication Center main groups of equipment:

E-Beam, Ion Beam & Mask Making

Optical Photolithography

Chemical Vapor Deposition

Metalization & Sputtering

Dry Etching

Annealing, Oxidation & Doping

Wet Benches

Wafer Bonding, Polishing and Sawing

Characterization & Testing

View Equipment and Process notes using a map of the lab.  

     View the LAB MAP here